However, Oyama said his greatest concern was Tokyo Electron's semiconductor manufacturing equipment plant. The greater concern is that semiconductor manufacturers seeking to expand capacity could face delays in installing production lines and increasing output. The quake has also prompted questions about whether semiconductor production and equipment manufacturing should be dispersed across a larger number of locations to reduce risk. Oyama said such decentralization may be considered for large semiconductor fabrication plants, but it would be difficult for semiconductor equipment manufacturers. Taken together, those factors are likely to sustain overseas manufacturers' interest in expanding production in Japan rather than drive them away, Oyama said.