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ASML’s Extreme Ultraviolet Lithography and the Limits of Reverse Engineering in China
['Andrea Gilli', 'Mauro Gilli', 'Francesco Fimiani', 'Nicolas Deriquehem']
War on the Rocks
Access to an extreme ultraviolet lithography machine could potentially accelerate component- and subsystem-level learning and reveal some architectural choices.
The advantage of extreme ultraviolet lithography machines stems from the performance they can achieve.
But this is not the central challenge of producing an extreme ultraviolet lithography machine.
This massive complexity explains the cost of an extreme ultraviolet lithography machine, on the order of $180 million, with the newest high-numerical-aperture extreme ultraviolet machines costing roughly $380 million.
A fully functioning extreme ultraviolet lithography machine cannot produce a single leading-edge chip on its own.