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Silicon Photonics MEMS-based Optical Switch Using a Zero-Change Foundry–Compatible Process (UC Berkeley)
['Technical Paper Link', 'Tom Katsioulas', 'Alex', 'Matt Bailey', 'Alexis R. Ware', 'Yağız Boz', 'Murugavel Ganesan', 'F. Chen', 'B.S. Deepaksubramanyan', 'Brian Bailey']
Semiconductor Engineering
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