RF power rack for HDP-CVD tools reduces operational costs and increases uptimeAdvanced Energy Industries, Inc ., a global specialist in highly engineered, precision power conversion, measurement and control solutions, has launched the Opti RF power rack for legacy high-density plasma chemical vapor deposition (HDP-CVD) tools. Delivering over 70 per cent system-level efficiency at full power, Opti is designed to reduce energy costs and improves uptime, compared to legacy systems. “Advanced Energy’s Opti RF power rack will extend the life of legacy tools and reduce the energy consumption and carbon footprint of the fab.”The rack integrates Paramount 13.56 MHz and dual 2 MHz Paramount Plus generators, with front-and-back access for easier maintenance. Its built-in dashboard, powered by PowerInsight by Advanced Energy software, offers real-time diagnostics, remote access, and predictive alerts—cutting troubleshooting time by up to 90per cent. Advanced Energy offers global services that include on-site installation and support, as well as local assistance for companies upgrading 200 mm fabs worldwide.